Plasma Enhanced Chemical Vapor Deposition System for Graphene Production

Negotiable 1 Piece (MOQ)
Min. Order:
1 Piece
Port:
Shanghai, China
Transport Package:
Woody Package
Payment Terms:
T/T, Western Union, Paypal

Last Login Date:

Mar 05, 2025

Business Type:

Manufacturer/Factory, Trading Company

Main Products:

Tube Furnce, Muffle Furnace, Rtp Sliding Tube Furnace, CVD System, Pecvd System, Rotation Tube Furnace, Vacuum Pump, Gas-Supply System, Sublimation Equipment for OLED Material, Furnace Accessories

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Product Description

Company Info

Basic Info.

Customized
Customized
Structure
Desktop
Material
Alloy
Certification
CE
Application
Lab
Type
Heating Type
Max Temperature
1200c
Heating Zone Length
440mm
Constant Zone Length
150mm
Limited Pressure
10-3PA
Oil Capacity
1.1L
Standard Range Capacity
100 ,200,500sccm
Inlet and Outlet Connection Port
Kf25
Heating Element
Resistance Wire
Trademark
BEQ
Specification
CE
Origin
Hefei City, Anhui Province, China
HS Code
8508190000

Product Description

 Plasma enhanced rotational PECVD system,
BTF-1200C-R-PECVD

Product description:
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .
Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to  35 degree.
Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.
Main parameter:
Furnace 
Max. Tem1200°C
 
Heating zone length440mm
Constant zone length200mm
Tem. controlPID automatic control with 30 steps programmable,Operation interface is 7 "industrial control computer  
Tube SizeΦ60*420+Φ100*360+Φ60*420mm
Furnace body inclination angle 0~35°(adjustable)
Furnace tube rotation rate3~13r/min
PE source 
Signal frequency13.56 MHz±0.005%
Power output range0-500W
Max. reflection power100W
RF output interface50 Ω, N-type, female
Power stability≤5W
Gas supply systemHigh precision mass Flowmeter(Range optional)
Accuracy±1.5%
Response accuracy±0.2%
Response timeGas characteristics:1~4sec
Electrical characteristics :10sec
 
Working pressure difference range0.1~0.5MPa
Max. pressure3MPa
ConnectionΦ6mmDouble clasp stainless steel joint
Vacuum unitKF25 series bellows and manual stopper valves
Vacuum degree10-1 pa
The value can be displayed intuitively by the digital display vacuum tester
 
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